TY  - BOOK
AU  - Pierson,Hugh O.
TI  - Handbook of chemical vapor deposition (CVD) : principles, technology, and applications
SN  - 0815514328 (hbk): 
AV  - TS695 .P52 1999
U1  - 671.735 23rd
PY  - 1999///
CY  - New York : 
PB  - Noyes Publications, 
KW  - Chemical vapor deposition
KW  - Handbooks, manuals, etc
KW  - Vapor-plating
KW  - Chemistry
N1  - Includes bibliographical references and Index
UR  - http://www.loc.gov/catdir/description/wap041/99026065.html
UR  - http://www.loc.gov/catdir/toc/wap041/99026065.html
ER  -