TY - GEN AU - Sze, S. M. TI - Semiconductor Devices: Physics and Technology/ SN - 9788126516810 (pbk.) : U1 - 537.622 23 rd PY - 2002/// CY - New Delhi: PB - Wiley India, KW - Semiconductors KW - Mathematics N1 - Includes bibliographical references and Index N2 - This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices ER -