000 | 01226cam a22003254a 4500 | ||
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999 |
_c267 _d267 |
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001 | 1213501 | ||
003 | OSt | ||
005 | 20170410112720.0 | ||
008 | 990324s1999 nyu bf 001 0 eng | ||
010 | _a 99026065 | ||
020 |
_a0815514328 (hbk): _cUSD 245.00 |
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040 |
_aDLC _cIISER- BPR _dDLC |
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042 | _apcc | ||
050 | 0 | 0 |
_aTS695 _b.P52 1999 |
082 | 0 | 0 |
_223rd _a671.735 _bPIE/H |
100 | 1 | _aPierson, Hugh O. | |
222 | _aChemistry | ||
245 | 1 | 0 |
_aHandbook of chemical vapor deposition (CVD) : principles, technology, and applications / _cby Hugh O. Pierson. |
250 | _a2nd ed. | ||
260 |
_aNew York : _bNoyes Publications, _cc1999. |
||
300 |
_axxiv., 482 p. : _bill. ; _c24 cm. |
||
504 | _aIncludes bibliographical references and Index. | ||
650 | 0 |
_aChemical vapor deposition _vHandbooks, manuals, etc. |
|
650 | 0 |
_aVapor-plating _vHandbooks, manuals, etc. |
|
650 | 0 | _xChemistry | |
856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wap041/99026065.html |
856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wap041/99026065.html |
906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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942 |
_2ddc _cBK |