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020 _a9788126516810 (pbk.) :
_cRs. 619.00
040 _cIISER- BPR
_dIISER- BPR
041 _aENG
082 _223 rd
_a537.622
_bSZE/S
100 _aSze, S. M.
222 _aPHYSICS
245 _aSemiconductor Devices: Physics and Technology/
_c[by] S. M. Sze
250 _a2nd.
260 _aNew Delhi:
_bWiley India,
_cc2002
300 _aviii, 564 p. :
_bill. ;
_c23 cm.
504 _aIncludes bibliographical references and Index.
520 _aThis book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
650 _aSemiconductors.
650 _aMathematics
942 _2ddc
_cBK