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Handbook of chemical vapor deposition (CVD) : principles, technology, and applications / by Hugh O. Pierson.

By: Material type: TextTextPublication details: New York : Noyes Publications, c1999.Edition: 2nd edDescription: xxiv., 482 p. : ill. ; 24 cmISBN:
  • 0815514328 (hbk):
Subject(s): DDC classification:
  • 23rd 671.735 PIE/H
LOC classification:
  • TS695 .P52 1999
Online resources:
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